2004 Paper 6
2023-08-24
조회 65

Dae-Hwan Kang, Dong-Kak Lee, Ki-Bum Kim, Jung-Joong Lee, and Junghoon Joo, “Ion energy distribution change at the transition of power-coupling modes in an immersed-coil-type inductively coupled Ar discharge”, Appl. Phys. Lett. vol. 84, p. 3283 (2004).


2023-08-24
조회 41

Dae-Hwan Kang, Dong-Ho Ahn, Min-Ho Kwon, Hyuk-Soon Kwon, Ki-Bum Kim, Kyeong Seok Lee, and Byung-ki Cheong, “Lower voltage operations of a phase change memory device with a highly resistive TiON layer”, Jpn. J. Appl. Phys. Part I vol. 43, no. 8A, p. 5243 (2004).


2023-08-24
조회 49

Hyun-Mi Kim, Sung-Soo Yim, Ki-Bum Kim, Dae-Hwan Kang, Seung-Hyun Moon, Young-Woon Kim, and Ho-Nyum Lee, “The reaction sequence and microstructure evolution of an MgB2 layer during post annealing of amorphous boron film”, J. Mater. Res. vol. 19, no. 2, p. 409 (2004).


2023-08-24
조회 47

Hyun-Mi Kim, Sung-Soo Yim, Ki-Bum Kim, Seung-Hyun Moon, Dae-Hwan Kang, Young-Woon Kim, and Ho-Nyum Lee, “Growth Kinetics of MgB2 Layer and Interfacial MgO Layer During ex situ Annealing of Amorphous Boron Film”, J. Mater. Res. vol. 19, no. 10, p. 3081 (2004).


https://link.springer.com/article/10.1557/JMR.2004.0383

2023-08-24
조회 51

Soo-Hyun Kim, Su Suk Oh, Ki-Bum Kim, Dae-Hwan Kang, Wei-Min Li, Suvi Haukka, and Marko Tuominen, “Characterization of atomic-layer-deposited WNxCy thin films as a diffusion barrier for copper metallization ”, Journal of Electrochemical Society 151 (4), C272 (2004).


2023-08-24
조회 53

D. K. Lee, D. H. Kang, H. Y. Lee, and J. J. Lee “Properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition” Surf. Coating and Technology, vol. 188 – 189, p. 440 (2004).


Address

Dep. of Semiconductor Engineering, POSTECH 77,

Cheongam-ro, Nam-Gu, Pohang, Gyeongbuk-Do, Korea

(37673)


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E-mail: daehwankang@postech.ac.kr



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Copyright ⓒ 2023. Chalcogenide Semiconductor Lab (CSL) All rights reserved | Designed by greypixel